• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Pressure measuring device (1) comprising a plate (3) carrying a pressure sensor (10) which defines a first sealed chamber (30) with a first face (4) of the plate (3), the pressure sensor ( 10) comprising a substrate (11) having opposing faces (11.1, 11.2) opposite which respectively extend a first deformable membrane (15) and a second deformable membrane (17), the first membrane (15) and the second membrane (17) respectively defining with the substrate a second sealed enclosure (31) and a third sealed enclosure (32), the pressure sensor (10) comprising a cover (21) for defining a fourth sealed enclosure (33) connected by a second channel (40) at the first chamber (30), the pressure sensor (10) comprising measuring means (12, 13, 14, 16) for the deformation of the first (15) and the second (17) membrane deformable.
    公开号:FR3037140A1
    申请号:FR1555040
    申请日:2015-06-03
    公开日:2016-12-09
    发明作者:Jean-Christophe Riou；Eric Bailly
    申请人:Sagem Defense Securite SA；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The present invention relates to the field of pressure measurement and more particularly to electromechanical fluid pressure sensors for aeronautical applications, and in particular MEMS type sensors. BACKGROUND OF THE INVENTION An electromechanical pressure sensor generally comprises a silicon or silicon alloy membrane on the front side of which are reported Wheatstone bridge piezoelectric deformation gauges and connected to an electronic processing unit by means of electrodes. connection wires. The rear face opposite the one carrying the gauges is subjected to a pressure to be measured which, by deforming the membrane, solicits the gauges and makes it possible to measure the pressure electrically. The membrane is generally mounted on a substrate also silicon. Silicon being particularly sensitive to electrochemical attacks, the membrane is mounted at one end of a conduit filled with a transfer fluid, usually silicone oil. The other end of the conduit is closed by a stainless steel pellet whose outer face is in contact with the fluid whose pressure is to be measured.
    [0002] The pressure applied to the stainless steel pellet is transmitted, via the transfer fluid, to the silicon membrane and measured by the processing unit from the signals provided by the strain gauges. The electrical signal generated by the processing unit is then transmitted to a communication network. The sensor thus obtained is generally bulky, heavy and expensive, in particular because of the presence of the oil filled duct and the associated sealing elements. Indeed, the oil must be absolutely incompressible, and such oils are expensive and freeze at low temperature to the point of transmitting vibrations. In cases where they are not completely free of impurities and / or free radicals, these oils 5 generate electric drifts when subjected to an electrical voltage. The filling of the cylindrical conduit must be carried out extremely rigorously because the presence of air in the conduit would make the sensor inaccurate, or even inoperative. This operation and its control increase the production costs of the sensor. Finally, such a sensor is extremely sensitive to rapid changes in the temperature of the fluid whose pressure is to be measured. Indeed, although piezoelectric sensors are notoriously known for having a reduced sensitivity to temperature variations, the behaviors of the transfer fluid and the duct induce errors that are difficult to compensate. Finally, at extremely low temperatures, the transfer fluid can freeze and render the sensor inoperative. OBJECT OF THE INVENTION The object of the invention is to reduce the cost and thermal sensitivity of an electromechanical pressure sensor.
    [0003] SUMMARY OF THE INVENTION For this purpose, there is provided a pressure measuring device comprising a plate carrying a pressure sensor which defines a first sealed enclosure with a first face of the plate, the plate having a second projecting surface of which extends a fixing foot. The device also includes a first channel extending at least in the foot to open into the first enclosure. According to the invention, the pressure sensor comprises a substrate having opposing facing faces which respectively extend a first deformable membrane and a second deformable membrane, the first membrane and the second membrane extending away from the substrate. defining therewith a second sealed enclosure and a third sealed enclosure, the pressure sensor comprising a cover extending facing the second membrane to define a fourth sealed enclosure connected by a second channel to the first enclosure. The pressure sensor also comprises means for measuring the deformation of the first and second deformable membrane. The sealed enclosures are intended to contain the fluid and to isolate the membranes from the pressure of the external environment. The device thus obtained comprises a pressure measuring element directly subjected to the fluid whose pressure must be measured. The absence of transfer oil makes it possible to obtain a lighter and less expensive device to produce. The application of the pressure on either side of the substrate makes it possible to balance the internal forces on the substrate and improves the linearity and accuracy of the device. According to a particularly advantageous embodiment, the means for measuring the deformation of the membrane comprise a pair of first electrodes each extending on one face of the substrate and facing which a respective second electrode integral with the first deformable membrane extends respectively. and a third electrode integral with the second deformable membrane. It is then possible to measure the deformation of the first and the second membrane by measuring the capacitance of the capacitors with variable capacitance thus formed. The sensitivity of capacitive sensors to thermal variations is almost zero and the device according to this embodiment thus requires little or no temperature compensation.
    [0004] Advantageously, the second channel extends at least through a periphery of the first deformable membrane, the substrate and the second deformable membrane. The device remains compact and does not require an external conduit to bring pressure to the second membrane. According to a particular embodiment, the cover comprises a processing unit for delivering an electrical signal as a function of the distances separating the first electrodes from the second and third electrodes. The integration of the processing unit directly to the measuring device makes it possible to obtain a more compact device and limits the bridges which can be sources of defects. Advantageously, the second and third sealed enclosures are at a substantially zero absolute pressure. This facilitates the calibration operations of the device and allows the realization of absolute pressure measurements. According to another advantageous embodiment, the outer surface of the device comprises a parylene coating which preserves the device from external aggression. Advantageously, the second face of the plate is arranged to cooperate with stops. Thus, the deformation of the foot of the device under mechanical stresses is limited to allowable values, guaranteeing the integrity of the device. Other characteristics and advantages of the invention will emerge on reading the following description of particular and non-limiting embodiments of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Reference will be made to the single figure which is a schematic sectional view of the invention.
    [0005] DETAILED DESCRIPTION OF THE INVENTION Referring to FIG. 1, the pressure measuring device according to the invention, generally designated 1, is mounted on a support 2 and comprises a plate 35 carrying a pressure sensor 10. . The sensor 10 defines a first sealed enclosure 30 with a first face 4 of the plate 3. An attachment foot 5 extends projecting from a second face 6 of the plate 3 opposite its first face 4 to the support 2 A first channel 7 extends in the fixing foot 5 from an orifice 8 passing through the support 2 to open into the first chamber 30. The sensor 10 comprises a silicon substrate 11 having opposing faces 11.1 and 11.2 each provided with a first electrode 12 and 13 respectively. A second electrode 14 integral with the first face 15.1 of a first deformable membrane 15 extends facing the first electrode 12. A third electrode 16 integral with the first face 17.1 of a second deformable membrane 17 extends, meanwhile, facing the first electrode 13. The first membrane 15 and the second membrane 17 extend at a distance d from the substrate 11. The plate 3 and the membranes 15 and 17 respectively comprise a per annular annular bulge - Pheric 9, 18 and 19 having a planar joining portion in their upper and lower parts. The bulges 9, 18 and 19 thus define respectively the peripheries of the plate 3, of the membrane 15 and of the membrane 17. The substrate 11 is substantially plane and comprises, for its part, a peripheral portion 20 which defines its periphery. As visible in FIG. 1, the substrate 11 is connected to the membranes 15 and 17 by assembling the planar portions of their respective peripheries. The plate 35 is also connected to the membrane 15 by assembling their respective peripheries. Thus, the membrane 15 defines with the substrate 11 a second sealed enclosure 31 around the first electrode 12. This enclosure 31 is delimited by the periphery of the membrane 15, the face 15.1 of the membrane 15 and the face 11.1 of the substrate 11 Similarly, the membrane 17 defines with the substrate 11 a third sealed enclosure 32 around the first electrode 13. This enclosure 32 is delimited by the periphery of the membrane 17, the face 17.1 of the membrane 17 and the face 11.2 of the substrate 11 The enclosures 31 and 32 are at a substantially zero absolute pressure and are interconnected by a conduit 22 passing through the substrate 11.
    [0006] The first sealed enclosure 30 is, for its part, delimited by the perimeters of the plate 3, the membrane 15, the face 4 of the plate 3 and the face 15.2 of the membrane 15 opposite the face 15.1. The sensor 10 also comprises a flat cover 21 which extends facing the face 17.2 of the membrane 17 opposite the face 17.1 and which is connected on its periphery to the upper portion of the bulge 19 of the membrane 17. The cover 21 defines with the membrane 17 a fourth sealed enclosure 33 delimited by the periphery 19, the lower face 21.1 of the cover 21 and the face 17.1 of the membrane 17. A second channel 40 fluidly connecting the first enclosure 30 and the fourth enclosure 33 extends through the respective perimeters of the first membrane 15, the substrate 11 and the second membrane 17. Thus the enclosures 30 and 33 are at the same pressure P. The cover 21 comprises a processing unit 50 connected via conductive wires 51 to electrodes 12, 13, 14 and 16. The processing unit 50, here an integrated circuit ASIC type (of the English "Application Specific 3037140 7 Integrated Circuit", is arranged to deliver a signal el electrical connection as a function of the distances separating the first electrodes 12 and 13 of the second electrode 14 and the third electrode 15. The conductive wires 51 pass through the peripheries of the membranes 15, 17 and the substrate 11 as well as the cover 21. treatment unit 50 can be connected, for example by means of a conductive wire 60 to a stud 61 integral with the support 2. In operation, the fluid whose pressure is to be measured (which is a gas and for example a neutral gas or air) occupies the channel 7 (via the orifice 8), the first chamber 30, the channel 40, and the enclosure 33. Under the effect of the pressure P, the membranes 15 and 17 are deformed and the distances separating the first electrodes 12 and 13 respectively from the second and third electrodes 14 and 16 vary. The capacitances of the capacitors formed by the pairs of electrodes 12/14 and 13/16 are then modified and transmitted to the processing unit 50 via the conductive wires 51. The processing unit 50 then converts these values into electrical signals which it transmits by means of a conducting wire 60 to a circuit connected to the pad 61. The device 1 advantageously receives on its outer surface and / or on the walls of the enclosures 30 and 33 a parylene coating in order to extend it longevity especially or in the case where the fluids whose pressure is to be measured are particularly aggressive. The carbon-like coatings of the DLC type - "Diamond Like Carbon" - are also suitable for protecting the outer surfaces of the sensor and / or the walls of the enclosures 30 and 33. The second face 4.1 of the plate 3 is here arranged to cooperate with stoppers 62 positioned on the support 2. For the purposes of this application, the term 3037140 8 electrode means any electrically conductive element. It then covers an element attached to a substrate or a membrane and a portion of substrate or membrane (or its entirety) having electrical properties to define a capacitor electrode. A ceramic membrane is therefore an electrode within the meaning of the present application. Of course, the invention is not limited to the embodiment described but encompasses any variant within the scope of the invention as defined by the claims. In particular: - although here the device has substantially the shape of a cylindrical right circular section, the invention is also applicable to other forms of devices such as a cylindrical device of square or rectangular guide curve, or a spherical device; although here the substrate of the sensor is made of silicon, the invention is also applicable to other types of substrate such as, for example, a substrate made of silicon alloy, multilayer ceramic with simultaneous high temperature cooking (HTCC) or low temperature simultaneous cooking multilayer ceramic (LTCC); although here the first and second membranes extend at identical distances from the faces of the substrate, the invention also applies to membranes extending at different distances from the faces of the substrate; - Although here the periphery of the membranes and the support are defined by an annular bulge, the invention is also applicable to other types of periphery such as for example a rectangular section wall or peripheral struts glued to the support 3037140 9 , substrate and / or membranes; - Although here the cover is flat, the invention is also applicable to other forms of cover such as a hemispherical dome-shaped cover; although here the second channel extends through the respective peripheries of the membranes and the substrate, the invention also applies to other configurations of the second channel, such as for example an outer conduit connecting the first and the fourth chamber, or an inner or outer conduit connecting the first channel to the fourth chamber; - Although here, the processing unit is an ASIC integral with the cover, the invention also applies to other processing means such as a microcontroller, the latter may be located on the support or on a other element; - Although here, the electrodes are connected to the processing unit by conductive son through the edges of the membranes and the substrate, the invention also applies to other connection means which may include for example conductive son outside the sensor, or conductive tracks printed on the sensor; although here the measurement of the deformation of the membranes is carried out by measuring the distance separating the electrodes (capacitive-type sensor), the invention also applies to other means for measuring the deformation of the membranes, such as for example, one or more piezoelectric elements such as those of piezoresistive, piezoelectric or resonant type sensors.
    权利要求:
    Claims (9)
    [0001]
    REVENDICATIONS1. Pressure measuring device (1) comprising a plate (3) carrying a pressure sensor (10) which defines a first sealed chamber (30) with a first face (4) of the plate (3), the plate (3) having a second surface (6) projecting from which extends a fixing foot (5), a first channel (7) extending at least in the foot (5) to open into the first chamber (30), the pressure sensor (10) comprising a substrate (11) having opposing faces (11.1, 11.2) opposite which respectively extend a first deformable membrane (15) and a second deformable membrane (17), the first membrane (15) and the second membrane (17) extending away from the substrate (11) defining therewith a second sealed enclosure (31) and a third sealed enclosure (32), the pressure sensor (10) comprising a cover ( 21) extending opposite the second membrane (17) to define a fourth sealed enclosure (33) connected by a second channel (40) to the first chamber (30), the pressure sensor (10) comprising measuring means (12, 13, 14, 16) for the deformation of the first (15) and the second (17) deformable membrane.
    [0002]
    2. Device (1) according to claim 1, wherein the means for measuring the deformation of the membrane comprises a pair of first electrodes (12, 13) each extending on one side of the substrate and facing which extend respectively a second electrode (14) integral with the first deformable membrane (15) and a third electrode (16) integral with the second deformable membrane (17).
    [0003]
    3. Device (1) according to claim 1, wherein the second channel (40) extends through a periphery of the first deformable membrane (15), the substrate (11) and the second deformable membrane (17). ).
    [0004]
    4. Device (1) according to claim 1, wherein the cover (21) comprises a processing unit (50) for delivering an electrical signal according to the distances separating the first electrodes (12, 13) of the second (14). and the third (16) electrode.
    [0005]
    5. Device (1) according to claim 1 wherein the second (31) and third (32) sealed enclosures are at a substantially zero absolute pressure.
    [0006]
    6. Device (1) according to claim 1, wherein the outer surface of the device (1) comprises a parylene coating.
    [0007]
    7. Device (1) according to claim 1, wherein the outer surface of the device (1) comprises a carbon coating DLC type.
    [0008]
    8. Device (1) according to claim 1, wherein the second face (6) of the plate (3) is arranged to cooperate with stops (62).
    [0009]
    9. Device (1) according to claim 1, wherein the plate (3) and the membranes (15, 17) comprise a peripheral annular bulge (9, 18, 19) having a planar joining portion at their upper and lower parts. , the substrate (11) being connected to the membranes (15, 17) by assembling planar portions of their respective peripheries and the plate (3) being connected to the first membrane (15) by assembling their respective edges.
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    同族专利:
    公开号 | 公开日
    EP3304020B1|2019-04-24|
    EP3304020A1|2018-04-11|
    US20180172534A1|2018-06-21|
    FR3037140B1|2017-06-02|
    US10288510B2|2019-05-14|
    CN107667279A|2018-02-06|
    WO2016193325A1|2016-12-08|
    CN107667279B|2019-04-16|
    引用文献:
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    US6431003B1|2000-03-22|2002-08-13|Rosemount Aerospace Inc.|Capacitive differential pressure sensor with coupled diaphragms|
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    JP6953513B2|2016-08-05|2021-10-27|スティーブン アラン マーシュ，|Micro pressure sensor|FR3037142B1|2015-06-03|2018-11-02|Safran Electronics & Defense|PRESSURE MEASURING DEVICE WITH IMPROVED RELIABILITY AND ASSOCIATED CALIBRATION METHOD|
    DE102015122220A1|2015-12-18|2017-06-22|Endress + Hauser Gmbh + Co. Kg|Ceramic pressure measuring cell with at least one temperature transducer and pressure transducer with such a pressure measuring cell|
    US11046575B2|2017-10-31|2021-06-29|Encite Llc|Broad range micro pressure sensor|
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    DE102018211331A1|2018-07-10|2019-10-31|Robert Bosch Gmbh|Micromechanical pressure sensor device and corresponding manufacturing method|
    法律状态:
    2016-05-24| PLFP| Fee payment|Year of fee payment: 2 |
    2016-12-09| PLSC| Search report ready|Effective date: 20161209 |
    2017-05-23| PLFP| Fee payment|Year of fee payment: 3 |
    2018-05-25| PLFP| Fee payment|Year of fee payment: 4 |
    2018-06-15| CD| Change of name or company name|Owner name: SAFRAN ELECTRONICS & DEFENSE, FR Effective date: 20180515 |
    2020-05-20| PLFP| Fee payment|Year of fee payment: 6 |
    2021-05-19| PLFP| Fee payment|Year of fee payment: 7 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1555040A|FR3037140B1|2015-06-03|2015-06-03|PRESSURE DETECTION DEVICE|FR1555040A| FR3037140B1|2015-06-03|2015-06-03|PRESSURE DETECTION DEVICE|
    US15/579,095| US10288510B2|2015-06-03|2016-06-01|Footed pressure measuring device|
    CN201680031706.1A| CN107667279B|2015-06-03|2016-06-01|Pressure sensing devices|
    PCT/EP2016/062416| WO2016193325A1|2015-06-03|2016-06-01|Pressure sensing device|
    EP16726570.1A| EP3304020B1|2015-06-03|2016-06-01|Pressure sensing device|
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